Scanning microscope with brightness control
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United States of America Patent
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Aug 2, 2005
Grant Date -
Dec 12, 2002
app pub date -
May 30, 2002
filing date -
Jun 8, 2001
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Automatic pattern matching and shape measurement are enabled by adjusting a brightness level of a microscope image based on information of a local region of the image so that a magnified image of the local region takes on an appropriate brightness and is not affected by brighter peripheral portions of the image, thereby enabling feature extraction of a desired pattern. By using the inventive method in an energized beam apparatus having a sample stage capable of linear and tilting movement, a series of operations including cross section forming, sample tilting, cross section observation, and pattern recognition, may be performed on an automated basis.
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