Method for vaporizing liquid material capable of vaporizing liquid material at low temperature and vaporizer using the same
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United States of America Patent
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Jul 12, 2011
Grant Date -
Mar 12, 2009
app pub date -
Sep 6, 2006
filing date -
Sep 9, 2005
priority date (Note) -
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status (Latency Note)
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Abstract
A vaporizer is provided with a vaporizing chamber heated by heaters; a primary filter positioned in a bottom end portion of the vaporizing chamber and heated by the heater; a liquid material supply portion for dropping down a flow-controlled liquid material from upper portion of the vaporizing chamber toward the primary filter; a carrier gas guiding passage for guiding a carrier gas into the underside of the primary filter; and a material delivering passage for discharging a mixed gas including the carrier gas and a vaporized liquid material from the top of the vaporizing chamber. The liquid material dropped down onto the primary filter is partially vaporized, while the rest thereof is atomized by being subjected to bubbling effect provided by the carrier gas flowing from underneath.
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