Interlocking lid for wet bench

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7140512
SERIAL NO

10761628

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An interlocking lid which is suitable for a wet bench tank used in the processing of semiconductor wafer substrates. The interlocking lid includes a pair of lid panels typically provided with a clasp having elements for engaging and interlocking with each other when the lid panels are in a closed position. At least one of the lids may further include a beveled lid shoulder which facilitates runoff of liquids from and hinders pooling of liquids on the exterior surface of the lid.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiang, Ming-Zhe Hsinchu, TW 1 0
Hua, Yuen-Sheng Ping-Tung, TW 2 0
Lee, Yuan-Bang Tongsiao Township, Miaoli County, TW 6 28
Yang, Chi-Shen Hsinchu County, TW 1 0

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