Control apparatus, positioning apparatus, lithography apparatus, and article manufacturing method

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United States of America Patent

PATENT NO 11693323
APP PUB NO 20220269185A1
SERIAL NO

17669725

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Abstract

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A control apparatus for controlling a controlled object includes a measuring device configured to measure a state of the controlled object, and a controller configured to generate a manipulated variable corresponding to an output of the measuring device and a target value. The controller includes a compensator configured to output an index corresponding to the output of the measuring device and the target value, and a converter configured to convert the index into the manipulated variable such that a probability at which a predetermined manipulated variable is generated is a target probability.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kurihara, Takashi Tochigi, JP 153 2105

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