Positive photosensitive composition
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United States of America Patent
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Apr 7, 2009
Grant Date -
Jun 21, 2007
app pub date -
Jan 26, 2007
filing date -
Jul 5, 2001
priority date (Note) -
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Abstract
A positive photosensitive composition comprising (A) an acid generator that generates an acid upon irradiation of an actinic ray or radiation, (B) a resin that has a monocyclic or polycyclic alicyclic hydrocarbon structure and is decomposed by the action of an acid to increase solubility in an alkali developing solution, and (C) a specific basic compound.
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