Gas detection device and gas detection method

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United States of America Patent

PATENT NO 11567021
SERIAL NO

16973063

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Abstract

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A gas detector uses a MEMS gas sensor having: a substrate provided with a cavity and an insulating film over the cavity; a metal oxide semiconductor and a heater both provided on the insulating film. A drive circuit operates the heater with a predetermined period for a predetermined pulse duration in order to heat the metal oxide semiconductor. The drive circuit halts operation of the heater or elongates the period when a humidity sensor detects that the atmosphere is humid.

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Patent Owner(s)

  • FIGARO ENGINEERING INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Izawa, Kuniyuki Minoo, JP 10 44
Kawaguchi, Tomohiro Minoo, JP 152 1823
Sai, Masakazu Minoo, JP 7 3

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