Tapering method for poromeric polishing pad

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United States of America Patent

PATENT NO 10259099
APP PUB NO 20180036860A1
SERIAL NO

15229009

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The method forms a porous polyurethane polishing pad by coagulating thermoplastic polyurethane to create a porous matrix having large pores extending upward from a base surface and open to an upper surface. The large pores are interconnected with small pores. Heating a press to temperature below or above the softening onset temperature of the thermoplastic polyurethane forms a series of pillows. Plastic deforming side walls of the pillow structures forms downwardly sloped side walls. The downwardly sloped side walls extend from all sides of the pillow structures. The large pores open to the downwardly sloped sidewalls are less vertical than the large pores open to the top polishing surface and are offset 10 to 60 degrees from the vertical direction.

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Patent Owner(s)

  • ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Huang, Hui Bin Monroeville, US 5 3
Jacob, George C Newark, US 34 95
Kawabata, Katsumasa Kyoto, JP 11 28
Luo, Shuiyuan Newark, US 15 42
Miyamoto, Kazutaka Mie, JP 7 53
Sanford-Crane, Henry Elkton, US 6 17
Yoshida, Koichi Kyoto, JP 87 888

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