MTJ read head with sidewall spacers
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United States of America Patent
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Jul 10, 2007
Grant Date -
Oct 19, 2006
app pub date -
Apr 14, 2005
filing date -
Apr 14, 2005
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Following CMP, a magnetic tunnel junction stack may protrude through the oxide that surrounds it, making it susceptible to possible shorting to its sidewalls. The present invention overcomes this problem by depositing silicon nitride spacers on these sidewalls prior to oxide deposition and CMP. So, even though the stack may protrude through the top surface of the oxide after CMP, the spacers serve to prevent possible later shorting to the stack.
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