Stamps including a self-assembled block copolymer material, and related methods

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United States of America Patent

PATENT NO 11560009
APP PUB NO 20210070086A1
SERIAL NO

17063323

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Abstract

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Methods for fabricating stamps and systems for patterning a substrate, and devices resulting from those methods are provided.

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Patent Owner(s)

  • MICRON TECHNOLOGY INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Millward, Dan B Boise, US 79 3346
Sandhu, Gurtej S Boise, US 1216 32355

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