Semiconductor device and manufacturing method for the semiconductor device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11848370
APP PUB NO 20220223712A1
SERIAL NO

17709264

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

The present disclosure provides a semiconductor device and a method for forming a semiconductor device. The semiconductor device includes a substrate, and a first gate dielectric stack over the substrate, wherein the first gate dielectric stack includes a first ferroelectric layer, and a first dielectric layer coupled to the first ferroelectric layer, wherein the first ferroelectric layer includes a first portion made of a ferroelectric material in orthorhombic phase, a second portion made of the ferroelectric material in monoclinic phase, and a third portion made of the ferroelectric material in tetragonal phase, wherein a total volume of the second portion is greater than a total volume of the first portion and the total volume of the first portion is greater than a total volume of the third portion.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Chih-Yu New Taipei, TW 94 224
Chui, Chi On Hsinchu, TW 401 1002
Lai, Te-Yang Hsinchu, TW 32 5
Peng, Chun-Yen Hsinchu, TW 35 29
Yeong, Sai-Hooi Hsinchu County, TW 432 899
Young, Bo-Feng Taipei, TW 157 277

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Jun 19, 2027
7.5 Year Payment $3600.00 $1800.00 $900.00 Jun 19, 2031
11.5 Year Payment $7400.00 $3700.00 $1850.00 Jun 19, 2035
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00