Method and system for the removal and/or avoidance of contamination in charged particle beam systems

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United States of America Patent

PATENT NO 11738376
APP PUB NO 20210237129A1
SERIAL NO

17238124

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Abstract

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A charged particle beam system is disclosed, comprising:

    a charged particle beam generator for generating a beam of charged particles;a charged particle optical column arranged in a vacuum chamber, wherein the charged particle optical column is arranged for projecting the beam of charged particles onto a target, and wherein the charged particle optical column comprises a charged particle optical element for influencing the beam of charged particles;a source for providing a cleaning agent;a conduit connected to the source and arranged for introducing the cleaning agent towards the charged particle optical element;

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VVELDHOVEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Koning, Johan Joost Delft, NL 17 92
Lattard, Ludovic Delft, NL 11 33
Lodewijk, Chris Franciscus Jessica Delft, NL 7 11
Mook, Hindrik Willem Delft, NL 8 20
Smits, Marc Delft, NL 15 20

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