Placing table including heat exchange medium path and substrate processing apparatus thereof

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11791177
APP PUB NO 20210043476A1
SERIAL NO

16987650

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A placing table configured to place a substrate on an electrostatic chuck includes a base; the electrostatic chuck placed on a placing surface of the base; and a path formed within the placing table along the placing surface, and configured to allow a heat exchange medium to flow therein from an inlet opening to an outlet opening of the heat exchange medium. A distance between a top surface of the path and the placing surface is constant from the inlet opening to the outlet opening. A cross sectional shape of the path in a direction perpendicular to the top surface is differed depending on a position in the path.

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Patent Owner(s)

  • TOKYO ELECTRON LIMITED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ezaki, Shota Miyagi, JP 7 0
Koizumi, Katsuyuki Miyagi, JP 32 206
Takahashi, Masanori Miyagi, JP 348 3539

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