Pedestal heater for spatial multi-wafer processing tool

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United States of America Patent

PATENT NO 11682576
APP PUB NO 20220319899A1
SERIAL NO

17845230

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Abstract

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Substrate supports comprising a top plate positioned on a shaft are described. The top plate including a primary heating element a first depth from the surface of the top plate, a inner zone heating element a second depth from the surface of the top plate and an outer zone heating element a third depth from the surface of the top plate. Substrate support assemblies comprising a plurality of substrate supports and methods of processing a substrate are also disclosed.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baluja, Sanjeev Campbell, US 132 3949
Kashyap, Dhritiman Subha Bangalore, IN 21 49
Ulavi, Tejas San Jose, US 26 33

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