Method of forming structures using a neutral beam

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United States of America Patent

PATENT NO 11643724
APP PUB NO 20210017648A1
SERIAL NO

16930211

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Abstract

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Methods of forming structures using a neutral beam, structures formed using a neutral beam, and reactor systems for forming the structures are disclosed. The neutral beam can be used to provide activated species during deposition of a layer and/or to provide activated species to treat a deposited layer.

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Patent Owner(s)

  • ASM IP HOLDING B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Hua Hsuan Sendai, JP 3 199
Kubota, Tomohiro Hachioji, JP 103 2062
Nozawa, Toshihisa Kawasaki, JP 132 5785
Samukawa, Seiji Sendai, JP 58 2142
Utsuno, Mitsuya Tachikawa, JP 7 1222

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