Evacuating apparatus
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United States of America Patent
Stats
-
Jan 20, 1998
Grant Date -
N/A
app pub date -
Jun 6, 1995
filing date -
Sep 3, 1992
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An evacuating apparatus includes a first pump section disposed on a suction opening side, a second pump section for exhausting a smaller amount of gas than the first pump section, the second pump being disposed in an exhaust opening side, a plurality of rotors accommodated in a housing, bearings for supporting rotation of the rotors, a suction opening for drawing fluid and a first exhaust opening thereof both formed on the housing, and a plurality of motors for driving the rotors. In the apparatus, the first pump section is a pump of positive displacement type formed by utilizing a volume change of a space defined by the rotors and the housing, and the second pump section is a viscous-type pump formed by utilizing a relatively moving surface formed in a small gap defined between the rotors and the housing.
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