Method and system for the directional detection of electrons in a scanning electron microscope
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United States of America Patent
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May 12, 2009
Grant Date -
Nov 9, 2006
app pub date -
Apr 25, 2006
filing date -
Oct 27, 2003
priority date (Note) -
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Abstract
A system detects electrons according to their emission direction in a scanning electron microscope. The system includes a scintillator electron detector and a set of electrodes focusing and controlling the electron flow. At least in two sectors of the electron flow from the sample stage (7) to the scintillator (3), sector flow control electrodes (9) are placed and supplied alternatively with electric pulses. The sector flow control electrodes (9) may be made of a metal grid or in a shape of conducting plates or deposited on the surface of a microporous plate in the form of a thin conductive layer.
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