Structure and methodology for characterizing device self-heating
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United States of America Patent
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Sep 28, 2010
Grant Date -
May 15, 2008
app pub date -
Nov 13, 2006
filing date -
Nov 13, 2006
priority date (Note) -
Expired
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Abstract
A method comprises determining a poly-gate temperature for a given device and determining channel temperatures of monitor devices. The method further includes extrapolating channel temperatures of the monitor devices to obtain a channel temperature for the given device. The difference in temperature (ΔT value) is determined for the given device based on the poly-gate temperature and the channel temperature. A device comprises a heating device having a poly gate with at least one contact at each end thereof and a plurality of monitor device spaced at known distances from the heating device
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