Dual-diaphragm assembly having center constraint

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United States of America Patent

PATENT NO 11780726
APP PUB NO 20230134752A1
SERIAL NO

17518350

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Abstract

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A MEMS diaphragm assembly comprises a first diaphragm, a second diaphragm, and a stationary electrode assembly spaced between the first and second diaphragms and including a plurality of apertures disposed therethrough. Each of a plurality of pillars is disposed through one of the plurality of apertures and connects the first and second diaphragms. At least one of the first and second diaphragms is connected to the stationary electrode assembly at a geometric center of the assembly.

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Patent Owner(s)

  • KNOWLES ELECTRONICS LLC

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kuntzman, Michael Chicago, US 27 145
Naderyan, Vahid Chicago, US 20 32
Pedersen, Michael Long Grove, US 79 922
Song, Xin Carol Stream, US 37 137
Zaman, Faisal Naperville, US 4 0

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