High throughput multi beam system and method
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United States of America Patent
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Feb 5, 2008
Grant Date -
Feb 2, 2006
app pub date -
Aug 2, 2004
filing date -
Apr 15, 2004
priority date (Note) -
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Abstract
A system and method for inspecting an article, the system includes a spatial filter that is shaped such as to direct output beams towards predefined locations and an optical beam directing entity, for directing the multiple output beams toward multiple detector arrays. The method includes spatially filtering multiple input light beams to provide substantially aberration free output light beams; and directing the multiple output beams by an optical beam directing entity, toward multiple detector arrays.
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