Corrosion-resistant and heat-resistant amorphous aluminum-based alloy thin film and process for producing the same
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United States of America Patent
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May 14, 1991
Grant Date -
N/A
app pub date -
Jul 11, 1989
filing date -
Jul 22, 1988
priority date (Note) -
Expired
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Abstract
The present invention provides a corrosion-resistant and heat-resistant aluminum-based alloy thin film consisting of a composite having a composition represented by the general formula, Al.sub.a Ni.sub.b X.sub.c N.sub.d, wherein: X is a metal element selected from Y and Zr and a, b, c and d are as follows, in atomic percentages: 70.ltoreq.a.ltoreq.93, 0.5.ltoreq.b.ltoreq.7.5, 0.5.ltoreq.c.ltoreq.12 and 1.ltoreq.d.ltoreq.18, the composite being at least 50% (by volume) composed of an amorphous phase. The thin films are produced by depositing a material having the composition represented by the above-defined general formula onto a substrate by a thin film formation technique, such as sputtering, vacuum deposition or ion plating. In the production process, only nitrogen may be supplied as gas. The novel aluminum-based alloy thin film has superior corrosion-resistance and heat-resistance together with high levels of hardness and wear resistance. Further, the thin films can be subjected to a high degree of bending.
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