Salt, quencher, resist composition and method for producing resist pattern

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11429025
APP PUB NO 20210063874A1
SERIAL NO

17004068

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Abstract

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A salt represented by formula (I), a quencher, and a resist composition including the same:

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Patent Owner(s)

  • SUMITOMO CHEMICAL COMPANY, LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ichikawa, Koji Osaka, JP 299 1930
Komuro, Katsuhiro Osaka, JP 46 225
Takahashi, Yuki Osaka, JP 432 2491

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