Method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement system

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United States of America Patent

PATENT NO 11022423
APP PUB NO 20210033383A1
SERIAL NO

16759294

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Provided is a method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement system, including: adding one or more redundant interferometers in a laser interferometer displacement measurement system; then establishing displacement calculating equations containing installation error of the laser interferometer and obtaining redundant measurement information by continuously measuring displacement information of multiple points, wherein the number of the combined displacement calculating equations is equal to the number of unknown quantities; and further solving the equation set to obtain the installation error of the interferometer. With a redundant arrangement of the laser interferometer, self-calibration of the installation error thereof can be achieved. A problem of difficulty in calibration of the installation error of the multi-axis interferometer in industrial application can be solved without assistance of other displacement sensors with higher precision.

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  • 501 TSINGHUA UNIVERSITY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheng, Rong Beijing, CN 30 45
Du, Shengwu Beijing, CN 1 0
Hu, Jinchun Beijing, CN 28 43
Shang, Enyao Beijing, CN 1 0
Yang, Kaiming Beijing, CN 29 52
Yin, Wensheng Beijing, CN 25 55
Zhang, Ming Beijing, CN 831 6682
Zhu, Yu Beijing, CN 359 3327

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