Importance

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Abstract

A tunable capacitor having low loss and a corresponding high Q is provided. The tunable capacitor includes first and second substrates having first and second capacitor plates disposed, respectively, thereon. The capacitor plates may include a high temperature superconductor material. A MEMS actuator, that is either driven by electrostatic force, heat or both, operably contacts the second substrate so that once the actuator is engaged it responds by displacing the second substrate, thereby varying the capacitance between said first capacitor plate and said second capacitor plate. As such, the capacitance can be controlled based upon the relative spacing between the first and second capacitor plates. The MEMS actuator may either be operably attached to the second substrate or detached, yet supporting, the second substrate.

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First Claim