Scanning type charged particle beam microscope
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Jan 27, 2004
Grant Date -
Feb 14, 2002
app pub date -
Jul 20, 2001
filing date -
Jul 27, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A scanning type charged particle beam microscope has a scanning signal generator for generating a scanning signal, a scanning device for scanning a surface of a sample to generate a scanned image of the surface of the sample in accordance with the scanning signal, and correcting device for correcting a shift of the scanned image. An image storing apparatus stores the scanned image after the shift of the scanned image has been corrected.
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