Porous gas sensors and method of preparation thereof
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United States of America Patent
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Nov 23, 2010
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app pub date -
Jan 24, 2005
filing date -
Mar 29, 2001
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Abstract
A sensor is disclosed. A representative sensor includes a silicon substrate having a porous silicon region. A portion of the porous silicon region has a front contact is disposed thereon. The contact resistance between the porous silicon region and the front contact is between about 10 ohms and 100 ohms.
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