Radiation detection device and method of making the same
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United States of America Patent
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-
Aug 21, 2001
Issued Date -
N/A
app pub date -
Feb 10, 1999
filing date -
Feb 14, 1997
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Light-receiving devices are two-dimensionally arranged on a substrate, bonding pads electrically connected to the light-receiving devices in the respective rows or columns via signal lines are arranged on the outer periphery of the substrate, and a protective passivation film is disposed on the light-receiving devices and signal lines, thereby forming a light-receiving device array. A scintillator made of columnar crystals of CsI is deposited on the light-receiving surface of the light-receiving device array, whereas a protective film in which an Al inorganic film is held between organic films, made of Parylene is laminated thereon. The outer periphery of the protective film is cut at a position where the bonding pads are exposed, and is brought into close contact with the passivation film with the aid of the coating resin.
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