Process flow for fabricating integrated photonics optical gyroscopes

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United States of America Patent

PATENT NO 11435184
SERIAL NO

17536749

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Abstract

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Aspects of the present disclosure are directed to configurations of compact ultra-low loss integrated photonics-based waveguides for optical gyroscope applications, and the methods of fabricating those waveguides for ease of large scale manufacturing. Four main process flows are described: (1) process flow based on a repeated sequence of oxide deposition and anneal; (2) chemical-mechanical polishing (CMP)-based process flow followed by wafer bonding; (3) Damascene process flow followed by oxide deposition and anneal, or wafer bonding; and (4) CMP-based process flows followed by oxide deposition. Any combination of these process flows may be adopted to meet the end goal of fabricating optical gyroscope waveguides in one or more layers on a silicon substrate using standard silicon fabrication technologies.

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Patent Owner(s)

  • ANELLO PHOTONICS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Feshali, Avi Los Angeles, US 27 167
Paniccia, Mario Santa Clara, US 36 127

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