Apparatus for evaluating plasma polymerized polymer layer using UV spectrometer
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United States of America Patent
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Jul 20, 2004
Grant Date -
Mar 13, 2003
app pub date -
Nov 6, 2001
filing date -
Feb 7, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus for evaluating a performance of a plasma-polymerized polymer layer using a UV spectrometer, including a polymerizing chamber for forming a polymerized polymer layer on a surface of a substrate by plasma discharging, a UV probe mounted contactless to the polymerized polymer layer formed in the polymerizing chamber and transmitting/receiving UV to and from the polymer layer and a UV spectrometer analyzing a signal inputted from the UV probe. With this apparatus, the characteristic of the surface of the substrate having a polymer layer consecutively polymerized by plasma can be evaluated in a contactless way, and the evaluation can be performed without affecting the process parameters such as the degree of vacuum within the chamber.
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