Drive laser for EUV light source

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United States of America Patent

PATENT NO 8514486
SERIAL NO

12927012

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Abstract

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A device comprising a laser source producing a continuous output on a beam path and an amplifier is disclosed. The device further includes a partially transmissive, partially reflective optic disposed on said beam path between said laser source and said amplifier. The device further includes a droplet generator positioned to deliver a droplet moving on a path intersecting said beam path, the droplet reflecting light to establish an optical cavity with said optic.

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bowering, Norbert R Bielefeld, DE 24 492
Ershov, Alexander I Escondido, US 150 5293
Fomenkov, Igor V San Diego, US 156 5473
Hoffman, Jerzy R Montebello, US 12 311

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