Package component with stepped passivation layer

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11961762
APP PUB NO 20220336276A1
SERIAL NO

17809960

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A method includes forming a first conductive feature, depositing a passivation layer on a sidewall and a top surface of the first conductive feature, etching the passivation layer to reveal the first conductive feature, and recessing a first top surface of the passivation layer to form a step. The step comprises a second top surface of the passivation layer. The method further includes forming a planarization layer on the passivation layer, and forming a second conductive feature extending into the passivation layer to contact the first conductive feature.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Wen-Che Taichung, TW 3 5
Cheng, Ming-Da Taoyuan, TW 411 4345
Lee, Song-Bor Zhubei, TW 26 234
Lee, Tzy-Kuang Taichung, TW 16 5
Lu, Wen-Hsiung Tainan, TW 117 2271
Tsai, Po-Hao Taoyuan, TW 242 3971

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Oct 16, 2027
7.5 Year Payment $3600.00 $1800.00 $900.00 Oct 16, 2031
11.5 Year Payment $7400.00 $3700.00 $1850.00 Oct 16, 2035
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00