Estimator and vacuum valve
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United States of America Patent
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Nov 7, 2023
Grant Date -
Sep 16, 2021
app pub date -
Mar 8, 2021
filing date -
Mar 13, 2020
priority date (Note) -
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status (Latency Note)
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Abstract
An estimator comprises: an acquisitor to acquire a plurality of data pairs each containing a valve body opening of the vacuum valve and the chamber pressure at the valve body opening; and an operator to operate the gas species characteristic value and the first chamber volume estimation value, based on an exhaust's expression representing a relationship among the second effective exhaust rate, a flow rate of a gas introduced into the vacuum chamber, a chamber volume, and a chamber pressure, the plurality of data pairs acquired in the acquisitor, and correlation data between the valve body opening and the second effective exhaust rate about the predetermined known gas.
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