Method for employing vertical acid transport for lithographic imaging applications
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United States of America Patent
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Jan 9, 2007
Grant Date -
Jul 1, 2004
app pub date -
Dec 30, 2002
filing date -
Dec 30, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention provides methods for forming images in positive- or negative-tone chemically amplified photoresists. The methods of the present invention rely on the vertical up-diffusion of photoacid generated by patternwise imaging of an underlayer disposed on a substrate and overcoated with a polymer containing acid labile functionality. In accordance with the present invention, the vertical up-diffusion can be the sole mechanism for imaging formation or the methods of the present invention can be used in conjunction with conventional imaging processes.
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