Sheet-fed treating device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Jun 19, 2007
Grant Date -
Feb 26, 2004
app pub date -
Jan 9, 2002
filing date -
Jan 9, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A processing unit of the invention is a single wafer processing unit including: a processing container that can be vacuumed; a stage arranged in the processing container, on which an object to be processed can be placed; a discharging pipe connected to a bottom part of the processing container and extending substantially downward linearly; a vacuum pump directly connected to the discharging pipe; and a stage-supporting pillar arranged to extend in a substantially central portion of the discharging pipe and in a direction of the discharging pipe, the stage-supporting pillar supporting the stage.
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