Substrate cleaning device
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United States of America Patent
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Dec 6, 2022
Grant Date -
Jun 18, 2020
app pub date -
Dec 13, 2019
filing date -
Dec 13, 2018
priority date (Note) -
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status (Latency Note)
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Abstract
A substrate cleaning device that facilitates control of the amount of liquid supplied to a substrate and reduces adverse influences of the liquid supplied to a bearing part on the substrate is provided. The substrate cleaning device includes: a holding part that has a bearing part configured to rotatably hold a cleaning member for cleaning a substrate; a first supply part that has at least a part provided inside the holding part and supplies a first liquid into the cleaning member through the inside of the holding part; and a second supply part that supplies a second liquid to the bearing part.
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