Dram and method of making

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United States of America Patent

PATENT NO 11456301
APP PUB NO 20200350318A1
SERIAL NO

16931154

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Abstract

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Embodiments of the present disclosure generally relate to a storage device. More specifically, embodiments described herein generally relate to a dynamic random-access memory and the method of making thereof. In one embodiment, a cell array includes at least an active region and a field region adjacent to the active region. The active region includes at least one trench, a dielectric layer disposed in the trench, a first conformal layer disposed on the dielectric layer, and a conductive material disposed on the first conformal layer. The field region includes a trench, a dielectric layer disposed in the trench, a second conformal layer disposed on the dielectric layer, and a conductive material disposed on the second conformal layer. The second conformal layer has a different composition than the first conformal layer.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gautam, Satendra Kumar Ghaziabad Uttar Pradesh, IN 2 3
Kumar, Arvind Santa Clara, US 309 3370
Manhas, Sanjeev Uttarakhand, IN 3 7
Pakala, Mahendra Santa Clara, US 77 5216

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