Thermal optical chuck

United States of America Patent

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Mar 17, 2009
Grant Date
Apr 5, 2007
app pub date
Dec 1, 2006
filing date
Jun 7, 2004

priority date (Note)
Expired

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Abstract

An accessible optical path to a lower surface of a heatable device under test is provided by a thermal optical chuck comprising a transparent resistor deposited on transparent plate arranged to supporting the device in a probe station.

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Patent Owner(s)

CASCADE MICROTECH, INC.

International Classification(s)

G01R:MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC V....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Rumbaugh, Scott	Tigard, US	17	336

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Thermal optical chuck

Number of patents in Portfolio can not be more than 2000

United States of America Patent

11607331

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PATENT NO	7504823
APP PUB NO	20070075724A1
SERIAL NO	11607331
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
March 17, 2009	US,7504823,B2 US7504823B2	GRANTED PATENT AS SECOND PUBLICATION
April 05, 2007	US,20070075724,A1 US20070075724A1	FIRST PUBLISHED PATENT APPLICATION

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11607331

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