Wafer-supporting device and method for producing same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10854498
APP PUB NO 20130014896A1
SERIAL NO

13184351

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Abstract

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A wafer-supporting device for supporting a wafer thereon adapted to be installed in a semiconductor-processing apparatus includes: a base surface; and protrusions protruding from the base surface and having rounded tips for supporting a wafer thereon. The rounded tips are such that a reverse side of a wafer is supported entirely by the rounded tips by point contact. The protrusions are disposed substantially uniformly on an area of the base surface over which a wafer is placed, wherein the number (N) and the height (H [μm]) of the protrusions as determined in use satisfy the following inequities per area for a 300-mm wafer:

description='In-line Formulae' end='lead'(−0.5N+40)≤H≤53;5≤N≤100.description='In-line Formulae' end='tail'

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Patent Owner(s)

  • ASM IP HOLDING B.V.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fukuda, Hideaki Tama, JP 91 18630
Shoji, Fumitaka Kawasaki, JP 6 2075

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