Polishing pad employing polyamine and cyclohexanedimethanol curatives

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United States of America Patent

PATENT NO 11845156
APP PUB NO 20210008687A1
SERIAL NO

16923688

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Abstract

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A chemical-mechanical polishing pad comprising a thermosetting polyurethane polishing layer includes an isocyanate-terminated urethane prepolymer, a polyamine curative, and a cyclohexanedimethanol curative. The polyamine curative and the cyclohexanedimethanol curative are in a molar ratio of polyamine curative to cyclohexanedimethanol curative in a range from about 20:1 to about 1:1.

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Patent Owner(s)

Patent OwnerAddress
CMC MATERIALS LLC1209 ORANGE STREET WILMINGTON DE 19801

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brosnan, Sarah St. Charles, US 12 9
Fu, Lin Rancho Palos Verdes, US 76 379
Lee, Jaeseok Beaverton, US 18 47
Ma, Rui Aurora, US 197 1224
Tsai, Chen-Chih Naperville, US 10 15

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