Techniques for arranging solder balls and forming bumps

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United States of America Patent

PATENT NO 7891538
SERIAL NO

12542800

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A mask having a plurality of through holes and a mold having a plurality of cavities are provided, and the through holes and the cavities are aligned. Conductive balls are dispensed into the aligned through holes and cavities. Substantially one ball is dispensed into each aligned through hole and cavity, and the mask with the holes and the cavities in the mold are configured and dimensioned such that the balls are substantially flush with, or recessed below, an outer surface of the mask. The mask is removed, the conductive balls are aligned with pads of a semiconductor device, and the conductive balls are transferred to the pads by fluxless reflow in a formic acid environment. Vibrational, electrostatic, and direct transfer aspects are also disclosed.

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Patent Owner(s)

  • ULTRATECH, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Budd, Russell A North Salem, US 99 1894
Libsch, Frank R White Plains, US 65 1212
Nah, Jae-Woong Closter, US 154 1157

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