Composite film of 6FPBO and triple-shelled mesoporous silica hollow spheres and its preparation and use

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United States of America Patent

PATENT NO 11965070
APP PUB NO 20220145023A1
SERIAL NO

17453102

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Abstract

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The disclosure relates to the field of electronic materials, and in particular to a composite film of fluorinated polybenzoxazole (6FPBO) and triple-shelled mesoporous silica hollow spheres, and to its preparation and use. The composite film comprises fluorinated polybenzoxazole as a matrix and amino-functionalized triple-shelled mesoporous silica hollow spheres which are dispersed in the fluorinated polybenzoxazole matrix. A mass ratio of (amino-functionalized triple-shelled mesoporous silica hollow spheres)/(fluorinated polybenzoxazole) is 1/100 to 5/100. The composite film has excellent thermal stability and a lower dielectric constant.

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Patent Owner(s)

  • EAST CHINA UNIVERSITY OF SCIENCE AND TECHNOLOGY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Li, Lihui Shanghai, CN 5 0
Liu, Xiaoyun Shanghai, CN 34 36
Wang, Wentao Shanghai, CN 130 1347
Wu, Xiaohan Shanghai, CN 12 1
Wu, Zeyang Shanghai, CN 2 1
Xu, Jian Shanghai, CN 753 8422
Zhang, Zhe Shanghai, CN 304 2100
Zhuang, Qixin Shanghai, CN 1 0

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