Bake unit and apparatus for treating substrate

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United States of America Patent

PATENT NO 11714356
SERIAL NO

17469366

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The inventive concept provides a bake unit. The bake unit comprising: a housing having an upper cover and a lower frame, the upper cover and the lower cover in combination providing a treatment space for heat treatment of a substrate; a heater provided in the treatment space for heating a substrate placed thereon; a heater cup configured to surround the heater; and a first purge gas supply unit for providing a first purge gas flow to block inflow of outer air through a gap between the lower frame and the heater cup.

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Patent Owner(s)

  • SEMES CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jang, Ho Jin Cheonan-si, KR 11 21
Kim, Jun Ho Seongnam-si, KR 178 1409
Lee, Sang Hoon Suwon-si, KR 399 3384
Seo, Jong Seok Cheonan-si, KR 13 10
Song, Gyeong Won Cheonan-si, KR 5 3

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