Fuse structure window
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United States of America Patent
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May 26, 2009
Grant Date -
Feb 1, 2007
app pub date -
May 15, 2006
filing date -
Jul 19, 2002
priority date (Note) -
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status (Latency Note)
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Abstract
The present invention provides a fuse structure. The fuse structure comprises a substrate, a plurality of conductive layers, a plurality of dielectric layers and a plurality of conductive plugs. The novel fuse structure includes a plurality of fuse units, and a new layout of the fuse units to increase the pitch between the fuse units, preventing the fuse structure from failing when misalignment of the laser beam and thermal scattering of the laser beam damage the second layer of the fuse structure in the laser blow process, thus increasing reliability and yield.
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