Optical waveguide, forming material and making method
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United States of America Patent
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Apr 18, 2006
Grant Date -
Jan 29, 2004
app pub date -
Jul 17, 2003
filing date -
Jul 18, 2002
priority date (Note) -
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Abstract
An optical waveguide-forming material is comprised of a photocurable organopolysiloxane composition comprising an alkali-soluble organopolysiloxane and a photoacid generator, wherein the organopolysiloxane is obtained by (co)hydrolytic condensation of a triorganoxysilane having hydrolyzable epoxide and has an average molecular weight of 500-50,000 as determined by GPC using polystyrene standards. The optical waveguide-forming material, when subjected to pattern formation by photolithography, can be resolved with an alkaline aqueous solution, has a high sensitivity and resolution, and offers a cured film having improved light transmittance, heat resistance and humidity resistance.
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