Single motor control for substrate handler in processing system
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United States of America Patent
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May 2, 2000
Grant Date -
N/A
app pub date -
Feb 25, 1998
filing date -
Feb 25, 1998
priority date (Note) -
Expired
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Abstract
A substrate handler for use in a chamber in a vacuum processing system has a single motor for controlling the substrate handler's rotation and extension functions. The single motor is connected to an operating assembly that operates in two modes to alternatively rotate or extend the substrate handler. The two modes are defined by the relative rotational motion of two drive mechanisms that are rotated by the single motor. When the relative rotational motion for the two drive mechanisms is in the same axial direction, then the operating assembly operates in the first mode. When the relative rotational motion for the two drive mechanisms is in the opposite axial direction, then the operating assembly operates in the second mode. The single motor operates one of the drive mechanisms and an assembly that alternatively operates the other drive mechanism in either the same or the opposite axial direction as the first drive mechanism. Under this operation, the substrate handler alternatively rotates or extends depending on whether the drive mechanisms rotate in the same or opposite axial directions.
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
- APPLIED MATERIALS, INC.
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Kroeker, Tony | Georgetown, TX | 6 | 204 |
McAndrew, Robert M | Austin, TX | 2 | 45 |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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