Apparatus and method for detecting the deflection of elastic elements
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United States of America Patent
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Jan 12, 2016
Grant Date -
Apr 3, 2014
app pub date -
May 10, 2012
filing date -
May 19, 2011
priority date (Note) -
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Abstract
Shown are a device (26) and a method for detecting the deflection of a plurality of elastic elements (22), wherein the elastic elements (22) can be deflected out of a rest position against a restoring force and are suitable as resonators and/or for measuring a force acting on a respective elastic element (22). The elastic elements (22) are arranged periodically, The arrangement of the elastic elements (22) is illuminated using light, the coherence length of which is larger than the average spacing of adjacent elastic elements (22). A diffraction image is hereby created of the illuminating light scattered on the arrangement of elastic elements (22), and at least a portion of the diffraction image is detected by an optical sensor (32) directly or after interaction with further optical components. The detected image or image signal is subsequently analyzed in order to determine information relating to the deflection state of the elastic elements (22) therefrom.
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