Acoustic wave device and acoustic wave module including same
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United States of America Patent
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-
Dec 6, 2022
Grant Date -
N/A
app pub date -
Aug 27, 2021
filing date -
Aug 31, 2017
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An acoustic wave device includes a cover portion, an outer support layer, a support portion, a piezoelectric substrate, and functional elements on the piezoelectric substrate. The outer support layer is on the piezoelectric substrate around a region where the functional elements are disposed. The cover portion is opposed to the piezoelectric substrate with the outer support layer interposed therebetween. The support portion is in a hollow space defined by the piezoelectric substrate, the outer support layer, and the cover portion. The height of the support portion is smaller than that of the outer support layer and larger than that of each of the functional elements. A gap is provided between the support portion and the cover portion or between the support portion and the piezoelectric substrate.
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