Organic film forming apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11906246
APP PUB NO 20200310183A1
SERIAL NO

16899767

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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According to one embodiment, an organic film forming apparatus includes a chamber configured to maintain an atmosphere more reduced than an atmospheric pressure, at least one processing room provided inside the chamber and being surrounded by a cover, and an exhaust part configured to exhaust the inside the chamber. The processing room includes an upper heating part including first heaters, a lower heating part including second heaters, and facing the upper heating part, an upper heat equalizing plate provided on the lower heating part side of the upper heating part, a lower heat equalizing plate provided on the upper heating part side of the lower heating part, and workpiece supporters configured to support a workpiece through a gap between the upper and lower heat equalizing plates.

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Patent Owner(s)

  • SHIBAURA MECHATRONICS CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iso, Akinori Yokohama, JP 8 37
Nishibe, Yukinobu Yokohama, JP 8 37
Oomori, Keigo Yokohama, JP 1 0
Takahashi, Takashi Yokohama, JP 191 2602

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