Scanning electron microscope
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United States of America Patent
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Feb 21, 2006
Issued Date -
N/A
app pub date -
Sep 3, 2004
filing date -
Feb 29, 2000
priority date (Note) -
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Abstract
An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.
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