Acoustic wave device, acoustic wave device package, multiplexer, radio-frequency front-end circuit, and communication device

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United States of America Patent

PATENT NO 11588467
SERIAL NO

16562488

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Abstract

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An acoustic wave device includes a support substrate made of silicon, a piezoelectric body provided directly or indirectly on the support substrate, the piezoelectric body including a pair of main surfaces facing each other, and an interdigital transducer electrode provided directly or indirectly on at least one of the main surfaces of the piezoelectric body, a wave length that is determined by an electrode finger pitch of the interdigital transducer electrode being λ. An acoustic velocity VSi=(V1)1/2 of bulk waves that propagate in the support substrate, which is determined by V1 out of solutions V1, V2, V3 of x derived from the expression, Ax3+Bx2+Cx+D=0, is higher than or equal to about 5500 m/s.

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Patent Owner(s)

  • MURATA MANUFACTURING CO LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iwamoto, Hideki Nagaokakyo, JP 72 351

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