Piston mode lamb wave resonators

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United States of America Patent

PATENT NO 11962283
APP PUB NO 20230099342A1
SERIAL NO

18072994

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Piston mode Lamb wave resonators are disclosed. A piston mode Lamb wave resonator can include a piezoelectric layer, such as an aluminum nitride layer, and an interdigital transducer on the piezoelectric layer. The piston mode Lamb wave resonator has an active region and a border region, in which the border region has a velocity with a lower magnitude than a velocity of the active region. The border region can suppress a transverse mode.

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Patent Owner(s)

  • SKYWORKS SOLUTIONS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lam, Chun Sing San Jose, US 20 234
Lin, Chih-Ming Fremont, US 97 542
Liu, Jiansong Irvine, US 45 115
Tang, Gong Bin Moriguchi, JP 30 40
Zou, Jie Irvine, US 51 1152

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